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Sean Casey
( University of Nevada, Reno )
- Institution:University of Nevada, Reno
- Departments: Chemistry
- Disciplines: Chemistry, Physical Sciences
- Location:Washoe County
Biography
Our research is centered on the investigation of growth mechanisms of semiconductor materials during processes such as plasma-enhanced chemical vapor deposition (PECVD). To mimic these plasmas under more carefully controlled conditions, we use a hyperthermal beam of the reactive species of interest and single crystal semiconductor wafers.